Yttria Ceramic Components for Semiconductor Etching
Yttrium oxide parts for etch chambers and fluorine-plasma process environments.
01Product Overview
We supply custom ceramic components from yttrium oxide (Y₂O₃) for semiconductor etch and process tools exposed to aggressive fluorine-based plasmas.
Yttria is selected for its strong resistance to fluorine plasma attack relative to standard alumina, helping chamber parts maintain surface integrity and reduce particle generation in corrosive process conditions.
These components are produced to customer drawings and include domes, liners, shields, rings and other chamber-wear parts.
02Key Features
- Y₂O₃ purity
- 99.0–99.9%
- Fluorine-plasma resistance
- very good
- Bulk density
- ≥ 4.95 g/cm³
- Form
- custom chamber parts
03Available Materials
Yttrium oxide (Y₂O₃)
High-purity sintered yttria offering strong corrosion resistance in fluorine-plasma etch environments.
04Typical Applications
- Plasma etch chambers
- Fluorine-based process tools
- Chamber liners and shields
- Ceramic domes and insulating rings
05Technical / Customization Options
- Material
- Y₂O₃ yttrium oxide
- Purity options
- 99.0–99.9%
- Typical part forms
- domes, liners, rings, shields
- Max part dimension
- to 350 mm
- Surface
- ground / as-sintered
- Geometry
- per customer drawing
Machined to print. Send a STEP / DWG / PDF with tolerances for a DfM review and quotation.
06Quality & Supply
- Supplied as custom precision ceramic components by W2 Global Limited.
- High-purity material grades and chamber-part geometry are produced to your drawing and coordinated with our manufacturing partners.
- Material and inspection documentation available on request.
Frequently Asked Questions
Is this yttria powder or components?
We supply machined Y₂O₃ ceramic components — not raw yttria powder. Parts are produced to your drawing for use in etch chambers.
Can you make domes, liners and rings?
Yes — typical parts include domes, liners, shields and rings up to around 350 mm per drawing.
Why choose yttria over alumina?
Yttria resists fluorine-plasma attack much better than standard alumina, reducing particle generation in corrosive etch and clean processes.
Send us your drawing for Yttria (Y₂O₃) Ceramic Components
Tell us the material, dimensions, quantity and application. Our team will evaluate material selection and manufacturing feasibility with our manufacturing partners.
